Nanomaterials Instrument Facility
For more information visit http://www.nanofacility.neu.edu
eMRI operates the Nanomaterials Instrumentation Facility, equipped with state-of-the-art instruments worth several M$, which has been established with policies for user fees, instrument time, external charges and maintenance. The facility has generated a total of $74K in revenues from user fees. The facility supports 20 faculty, more than 100 postdocs and students, and 10 external companies.
Below are the principal facilities available on a fee-for-service or collaborative basis. For more information please use the contact information for the relevant instrument below, or contact Don Heiman.
- Microscopy - SEM, TEM
- AFM, STM, MFM, NSOM
- Chemical Analysis - EDX, ICPMS
- Optical spectroscopy capabilities including ultra-fast lasers
- Thin film deposition (such as PLD and MBE)
- Microwave measurement capabilities, from dc to mm-wave
- Cryogenic measurement capabilities, from mK upwards
- High-field superconducting magnets (14T)
- Powder x-ray
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High-Resolution |
Hitachi S4800 - The Institute has recently acquired a state-of-the-art field-emission SEM, Hitachi S4800, having a resolution of 1 nm. It is equipped with accessories, including, energy dispersive x-ray analysis (EDAX) for determining chemical composition, as well as a Nabity nanolithography e-beam pattern generation system. This instrument is an eMRI user facility. |
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Electron Microscopy |
Electron Microscopy Center - Provides instruction and supports research activities involving imaging technologies, such as light microscopes, scanning and transmission electron microscopes, and computer image analysis equipment. |
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Scanning Nanoprobes |
Atomic Force, scanning-tunneling, and near-field optical microscopes (AFM, STM, NSOM) are available either as user facilities or collaborative operation. |
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Scanning Optical Nanoprobe |
NSOM - Nanonics NSOM/SPM-100 near-field, scanning optical microscope with liquid helium temperature stage. CCD detectors for photoluminescence, fluorescence, reflectance, absorbance and Raman spectroscopies on the nanometer scale. |
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X-Ray Diffraction |
A Philips X'pert PRO PW3040/60 general purpose x-ray diffractometer is operated by the Mechanical and Industrial Engineering Department. It can used for phase identification, structure analysis, and thin-film analysis via glancing incident angle. |
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SQUID Magnetometer |
Quantum Design MPMS XL-5 SQUID magnetometer, with 5T maximum field, 10-8 emu relative sensitivity, AC susceptibility, vertical rotator, EverCool Dewar, and optical access. |
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Microfabrication Laboratory |
3500 square feet of class 10/100/1000/support space. Complete facilities for MEMS fabrication, including lithography, etch, thin film, and plating capabilities for 3 and 6 inch substrates. 2000 square feet of cleanroom and ancillary space. A JEOL 6100 SEM is coupled with a Nabity Nanometer e-beam Pattern Generation System and a Kevex EDX diffractometer. |
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Analytical tools |
Auger, RHEED, particle sizer, electrochemical workstation, Zeta potentiometer, magneto conductivity (T > 20mK, 9T), magneto-optics (9T, 14 T), MOKE, FTIR, Raman scattering, microwave apparatus, dielectometer. KLA-Tencor Laser surface scanner (200 nm resolution), two TSI CNC particle counters (10 nm resolution), goniometer, Nikon optical microscope system with auto-focus and an automated stage (1500x), four Megasonic and two ultrasonic cleaning stations, Headway Research Spinner, TSI particle classifier, bond tester, electrochemical work stations, particle size analyzer. |
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Advanced Scientific Computation Center |
ASCC supports a state-of-the-art Itanium-2 cluster and a separate Compaq Alpha cluster for high-end scientific research computing and education purposes. The Center was founded by external funding from NSF, Compaq Corporation and Hewlett-Packard. |